Product
Model/Part#: | ATM-105-1-S–CE-S293 | |
---|---|---|
Manufacturer: | Brooks Automation | |
Type: | automation | |
Description: | Atmospheric Top Mount 3-axis Brooks PRI Equipe ATM105 Robot - One or Two Vacuum Lines (for Single/Dual End-Effectors) - HAMA Wafer Sensor Option - "SEMI S2-93" Standard Option - 5.25" Arm Link w/ 7.1" Z-Stroke |